High quality processing, contamination-free devices

ADT 947 CO₂ Inline Injector (CO₂ Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO₂ gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

System Highlights:

• 2 Line display, monitoring and alarms
• Resistivity target and range setting
• Resistivity / Conductivity units display
• Dicing Communication (will be avaiable soon)

Technical Specifications: